Solving scatterometry problem for trapezoidal diffraction gratings
L.L. Doskolovich, E.A. Kadomina, I.I. Kadomin

Image Processing Systems Institute of the RAS,
Samara State Aerospace University

Full text of article: Russian language.

Abstract:
New methods for solving a scatterometry problem for trapezoidal diffraction gratings are proposed. The presented method is based on a neural network technique using a hybrid method based on the table lookup searching technique with subsequent optimization.  The proposed results demonstrate high accuracy of these methods.

Key words:
optical scatterometry, diffraction grating, a neural network.

Citation: Doskolovich LL, Kadomina EA, Kadomin II. Solving a scatterometry problem for trapezoidal diffraction gratings [In Russian]. Computer Optics 2008; 32(1): 29-32.

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