Optical systems with diffractive elements: ways of the chromatism correction
G.I. Greiysukh, E.G. Ezhov, S.V. Kazin, S.A. Stepanov

Penza State University of Architecture and Construction

Full text of article: Russian language.

Abstract:
We present the method which allows the receiving of the spatial frequency distribution function of the diffractive optical elements which provides achromatization of the focusing objective consisting of two diffractive elements. The given method differs from the known one that it allows the setting of minimal period of spatial frequency of the elements. Besides this method allows the researching the effect of minimal period on objective’s key parameters. By reason of technological limits of the minimal period these possibilities are especially important in the case of vacuum ultra-violet and X-ray radiation. Interdependences of the basic parameters of focusing diffractive achromatized doublet were investigated in the range of soft X-ray radiation. The basic performances of such doublet were compared with the same ones of the single diffractive lens.

Key words:
diffractive optical element, diffractive doublet, achromatization, axicon, soft X-rays.

References:

  1. Slusarev, G.G. Methods of the optical systems computing / G.G. Slusarev. - Mashinostroenie, 1969. - 672 p. - (in Russian).
  2. Rayces, J.L. Selection of glasses for achromatic doublets with reduced secondary spectrum. I. Tolerance conditions for secondary spectrum, spherochromatism, and fifth-order spherical aberration / J.L. Rayces, M. Rosete-Agilar // Aplied Optics. - 2001. - Vol. 40, No 31. - P. 5663-5676.
  3. Rosete-Agilar, M. Selection of glasses for achromatic doublets with reduced secondary spectrum. II. Application of the method for selecting pairs of glasses with reduced secondary spectrum / M. Rosete-Agilar, J.L. Rayces // Aplied Optics. - 2001. - Vol. 40, No 31. -P. 5677- 5692.
  4. Gan, M.A. Theory and methods of the kinoform and holographic optical elements design / M.A. Gan - GOI, 1984. - 140 p. - (in Russian).
  5. Gan, M. High-speed apo-lens with kinoform element / M. Gan, I. Potyemin, A. Perveev // Proceedings of SPIE. - 1991. - Vol. 1574. - P. 243-249.
  6. Greisukh, G.I. Diffractive-refractive hybrid corrector for achro- and apochromatic corrections of optical systems / G.I. Greisukh, E.G. Ezhov, S.A. Stepanov // Applied Optics. - 2006. - Vol. 45, No 24. - P. 6137-6141.
  7. Belsky, A.B. Creation and certification of fluorite. Prospects of design of optical systems for UV-photolithography / A.B.Belsky, M.A.Gan, I.A.Mironov // Proceedings of International Optical Congress "Optics-XXI Century": St. Petersburg State University of Information Technologies, Mechanics and Optics, 2006. - P. 9-17. - (in Russian).
  8. Blohin, M.A. Phisycs of the X-ray radiation / M.A. Blohin –  Gostechizdat, 1957. – 518 p. - (in Russian).
  9. Aristov, V.V. Modern achivements of the refractive X-ray optics / V.V. Aristov, L.G. Shabelnikov // Advances in Physical Sciences. - 2008. - V. 178, № 1. - P. 61-83. - (in Russian).
  10. Vinogradov, A.V. Mirror x-ray optics / A.V.Vinogradov, I.A.Brytov, A.JA.Grudsky, etc.; ed. А. V. Vinogradov. – Leningrad: Mashinostroenie, 1989. – 463 p. - (in Russian).
  11. Bennett, S.J. Achromatic combinations of hologram optical elements / S.J. Bennett // Applied Optics. - 1976. Vol. 15, No 2. - P. 542-545.
  12. Sweatt, W.C. Achromatic triplet using holographic optical elements / W.C. Sweatt // - Applied Optics. - 1977. Vol. 16, No 5. - P. 1390-1391.
  13. Weingärtner, I. Real and achromatic imaging with two planar holographic optical elements / I. Weingärtner // Optics Communications. - 1986. - Vol. 58, No 6. - P. 385-388.
  14. Farn, M.W. Diffractive doublets corrected at two wavelengths / M.W. Farn, J.W. Goodman // - J. Opt. Soc. Am. A. - 1991. - Vol. 8, No 6. - P. 860-867.
  15. Bobrov, S.T Optics of diffractive elements and systems / S.T. Bobrov, G.I. Greisukh, Yu.G. Turkevich – L.: Mashinostroenie, 1986. - 223 p. - (in Russian).
  16. Greisukh, G.I. Optics of diffractive and gradient-index elements and systems / G.I. Greisukh, S.T. Bobrov, S.A. Stepanov - Bellingham: SPIE Press, 1997. - 414 p.
  17. Greisukh, G.I. The comparative analysis of chromatism of the diffractive and refractive lenses/ G.I. Greisukh, E.G. Ezhov, S.A. Stepanov // Computer Optics. - 2005. - Iss. 28. - P. 60-65. - (in Russian).
  18. Poleshchuk, A.G. Methods for fabrication and certification of diffractive optical elements / A.G. Poleshchuk, V.P. Korol­kov // Proceedings of the conference “Holography in Russia and aboard. Theory and practice”. -M.: “HOLOGRAPHY-SERVICE Ltd.”, 2007. - P. 11-14. - (in Russian).
  19. Di Fabrizio, E. High-efficiency multilevel zone plates for keV X-rays / E. Di Fabrizio, F. Romanato, M. Gentili, S. Cabrini, B. Kaulich, J. Susini, R. Barrett // Nature. - 1999. - Vol. 401. - P. 895-898.
  20. Anderson, E.H. Nanofabrication and diffractive optics for high-resolution x-ray applications / E.H. Anderson, D.L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, D. Attwood // J. Vac. Sci. Technol. B. - 2000. - Vol. 18, Issue 6. - P. 2970-2975.
  21. Aristov, V.V. Modern x-ray optics of the high resolution / V.V. Aristov // Herald of the Russian Academy of Sciences. - 2002. - Vol. 72, No 11. - P. 963-968. - (in Russian).
  22. Nöhammer, B. Zoneplates for hard X-rays with ultra-high dif­fraction efficiencies / B. Nöhammer, J. Hoszowska, H.-P. Herzig, C. David // J. Phys. IV. - 2003. - Vol. 104. - P. 193-196.
  23.  Born, M. Principles of Optics, 5th ed /M. Born, E. Wolf - N.Y.: Pergamon Press, 1964.
  24. Gresukh, G.I. Triple cemented radial-gradient objectives / G. I. Gresukh, S. A. Stepanov, E. G. Ezhov // Journal of Optical Technology. – 1999. - Vol. 66, Iss. 10. - P. 918–921.

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