Modifictaion of the device for detection of cleanliness and flatness of optical substrates
P.Yu. Izotov, M.S. Glyanko, S.V. Sukhanov

Image Processing Systems Institute, Russian Academy of Sciences,

Samara State Aerospace University

Full text of article: Russian language.

Abstract:
The current paper presents research of new construction of device for detection of flatness and cleanliness of optical substrate from the dynamic state of a liquid drop deposited on its surface. This work contains results of study of the device in application to rapid assessment of surface cleanliness of substrates made of glass, sitall and chrome.

Key words:
roughness estimation of optical surface, estimation of optical substrate cleanliness, device for rapid assessment, wettability, liquid drop spreading, image of a liquid drop.

References:

  1. Poltavtsev, Yu.G. Technology of Surface Processing in Microelectronics / Yu.G. Poltavtsev, A.S. Knyazev – Kiev: “Technics” Publisher, 1990. – 206 p. – (in Russian).
  2. Stern M.B. Binary Optics Fabrication // In the book "Mi-cro-optics. Elements, systems and applications" edited by Hans Peter Herzig. London: Taylor&Francis Ltd, 1997. – P. 53-85.
  3. Volkov, A.V. Technology of DOE Fabrication / A.V. Volkov, N.L. Kazanskiy, V.A. Soifer, G.V. Usplenyev // In the book "Methods of Computer Optics" edited by V.A. Soifer. – Moscow: “Fizmatlit” Publisher, 2000. – P. 239-310. – (in Russian).
  4. Golovashkin, D.L. Technology of DOE Fabrication / D.L. Golovashkin, N.L. Kazanskiy, V.A. Soifer, V.S. Pavelyev, V.S. Solovyev, G.V. Usplenyev, and A.V. Volkov // In the book "Methods for Computer Design of Diffractive Optical Elements" edited by V.A. Soifer. – A Wiley Interscience Publication, John Wiley & Sons, Inc., 2002. – P. 267-345.
  5. 3D Laser Information Technologies / edited by P.E. Tverdokhleb. – Novosibirsk, ZAO IPP “Ofset”, 2003. – 551 p. – (in Russian).
  6. Kazanskiy, N.L. R-D Center for Solving Problems of Computer Optics / N.L. Kazanskiy // Computer Optics. – 2006. – N 29. – P. 58-77. – ISSN 0134-2452. – (in Russian).
  7. Kazanskiy, N.L. Study of Optical Microrelief Formation in the Plasma Generated High-Voltage Gas Discharge Outside the Electrode. / N.L. Kazanskiy, V.A. Kolpakov. – Moscow: “Radio and Communications” Publisher, 2009. – 220 p. – (in Russian).
  8. Volkov, A.V. A Method for the Diffractive Microrelief Formation Using the Layered Photoresist Growth. / A.V. Volkov, N.L. Kazanskiy, O.Yu. Moiseev, V.A. Soifer // Computer Optics. – 1996. – N 16 – P. 12-14. – ISSN 0134-2452. – (in Russian).
  9. Volkov, A.V. A Method for the Diffractive Microrelief Forming Using the Layered Photoresist Growth / A.V. Volkov, N.L. Kazanskiy, O.Yu. Moiseev, V.A. Soifer // Opt. And Lasers in Eng. – 1998. – Vol. 29(4-5). – P. 281-288.
  10. Volkov, A.V. Preparation of Substrate Surface for DOE Fabrication Using the Layered Photoresist Growth Method / A.V. Volkov, N.L. Kazanskiy, O.Yu. Moiseev // Computer Optics. – 2001. – N 21. – P. 113-116. – ISSN 0134-2452. – (in Russian).
  11. Volkov, A.V. Study of Plasma Etching Technology for Multilayered DOE Fabrication / A.V. Volkov, N.L. Kazanskiy, O.E. Rybakov // Computer Optics. – 1998. – N 18. – P. 130-133. – ISSN 0134-2452. – (in Russian).
  12. Volkov, A.V. Research of Diffractive Optics Elements Fabrication with Submicron Size Microrelief on the Silicon Substrate / A.V. Volkov, N.L. Kazanskiy, O.E. Rybakov // Computer Optics. – 1998. – N 18. – P. 133-138. – ISSN 0134-2452. – (in Russian).
  13. Volkov, A.V. Study of Processes of Photoresist Deposition and Etching to Improve the Accuracy of the Wide DOE Microrelief Formation / A.V. Volkov, N.L. Kazanskiy, O.Yu. Moiseev // Computer Optics. –1999. – N 19. – P. 143-146. – ISSN 0134-2452. – (in Russian).
  14. Volkov, A.V. Dry Etching of Polycrystalline Diamond Films / A.V. Volkov, N.L. Kazanskiy, G.F. Kostyuk, V.S. Pavelyev // Computer Optics. – 2001. – N 22. – P. 50-52 – ISSN 0134-2452. – (in Russian).
  15. Volkov, A.V. Research and Development of Technology of DOE Microrelief Formation on Sapphire Substrates. / A.V. Volkov, O.G. Istinova, N.L. Kazanskiy, G.F. Kostyuk // Computer Optics. – 2002. – N 24. – P. 70-73. – ISSN 0134-2452. – (in Russian).
  16. Volkov, A.V. Microrelief Fabrication Using Glasslike Chalcogenide Semiconductors / A.V. Volkov, N.L. Kazanskiy, O.Yu. Moiseev // Computer Optics. – 2002. –N 24. – P. 74-77. – ISSN 0134-2452. – (in Russian).
  17. Kazanskii, N.L. Anisotropic Etching of SiO2 in High-Voltage Gas-Discharge Plasmas / N.L. Kazanskii, V.A. Kolpakov, A.I. Kolpakov // Russian Microelectronics. – 2004. – V. 3, N 3. – P. 169-182. – ISSN 0544-1269. – (in Russian).
  18. Volkov, A.V. A Method for the Manufacture of Diffractive Optical Elements / A.V. Volkov, N.L. Kazanskiy, O.Yu. Moiseev // Patent RF of Invention ¹2231812 of June 27, 2004, Russian Bulletin of Inventions ¹ 18, 2004. – (in Russian).
  19. Pavelyev, V.S. Formation of diffractive microrelief on diamond film surface / V.S. Pavelyev., S.A. Borodin, N.L. Kazanskiy, G.F. Kostyuk, A.V. Volkov // Optics & Laser Technology. – 2007. – Vol. 39, N 6. – P.1234-1238. – ISSN 0030-3992.
  20. Nefyodov, V.I. Physical Techniques of Solid State Surfaces Science. / V.I. Nefyodov, V.T. Cherepnin – Moscow: “Nauka” Publisher, 1983. – 257 p. – (in Russian).
  21. D.P. Woodruff, T.A. Delchar. Modern Techniques of Surface Science. – Cambridge University Press, 1986.
  22. Ogura, K. Introduction to Surface Physics / K. Ogura, V.G. Lifshits, A.A. Saranin, A.V. Zotov, M. Katayama – Moscow: “Mir” Publisher, 2006. – 490 p. – (in Russian).
  23. Biryukov, A.V. AFM and X-Ray Investigations of Surface Roughness of Glass Substrates with non-Gaussian Height Distribution / A.V. Biryukov, S.V. Gaponov, B.A. Gribkov, M.V. Zorina, V.L. Mironov, N.N. Salashchenko // Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. – 2003. – N 2. – P. 17-20. – ISSN 0207-3528. – (in Russian).
  24. Borodin, S.A. Automated Device for Substrate Surface Cleanliness Estimation from the Dynamic State of a Liquid Drop, Deposited on its Surface / S.A. Borodin, A.V. Volkov., N.L. Kazanskiy // Computer Optics. – 2006. – N 28. – P. 70-75. – ISSN 0134-2452. – (in Russian).
  25. Kazanskiy, N.L. A Method for the Roughness Estimation of Dielectric Substrate / N.L. Kazanskiy, V.A. Volkov, S.A. Borodin // Patent RF of Invention ¹2231812 of August 20, 2008, Russian Bulletin of Inventions ¹23, 2008. – (in Russian).
  26. Borodin, S.A. Device for Analyzing Nanoroughness and Contamination on a Substrate from the Dynamic State of a Liquid Drop Deposited on its Surface. / S.A. Borodin, A.V. Volkov, N.L. Kazanskii // Journal of Optical Technology. – 2009. – Vol. 76, N 7. –P. 408–412. – ISSN 0030-4042. – (in Russian).
  27. Pereskokova, A.P. Tribometer Techniques Application for Monitoring of Details and Technological Environments Surface Cleanliness / A.P. Pereskokova, L.V. Solodovnikova, A.M. Akimova // Electronic Technics, Serie 7, Technology, production organization, and equipment. – 1979. – first edition. – P. 143-151.
  28. Kazanskiy, N.L. Parameter Optimization of a Tribometric Device for Rapid Assessment of Substrate Surface Cleanliness / N.L. Kazanskiy, V.A. Kolpakov, A.I. Kolpakov, S.V. Krichevsky, N.A. Ivliev // Computer Optics. – 2005. – N 28. – P. 76-79. – ISSN 0134-2452. – (in Russian).
  29. Kazanskiy, N.L. Interaction of Dielectric Substrates in the Course of Tribometric Assessment of the Surface Cleanliness / N.L. Kazanskiy, V.A. Kolpakov, S.V. Krichevsky, N.A. Ivliev // Computer Optics. – 2007. – V. 31, N 1. – P. 42-46. – ISSN 0134-2452. – (in Russian).
  30. Kazanskiy, N.L. Parameter Optimization of a Tribometric Device for Rapid Assessment of Substrate Surface Cleanliness / N.L. Kazanskiy, V.A. Kolpakov, A.I. Kolpakov, S.V. Krichevsky, N.A. Ivliev, M.V. Desjatov // Optical Memory & Neural Networks (Information Optics). – 2008. – Vol. 17(2). – P. 167-172.
  31. Soifer, V.A. Method of Substrate Surface Cleanliness Estimation / V.A. Soifer, N.L. Kazanskiy, V.A. Kolpakov, A.I. Kolpakov, V.V. Podlipnov // Patent RF of Invention ¹2380684 of January 27, 2010, Russian Bulletin of Inventions ¹3, 2010. – (in Russian).
  32. Borodin, S.A. Study of Spreading of Liquid Drop, Deposited on the Surface of Substrate / S.A. Borodin // Computer Optics. – 2006. – N 28. – P. 66-69. – ISSN 0134-2452. – (in Russian).

© 2009, IPSI RAS
Institution of Russian Academy of Sciences, Image Processing Systems Institute of RAS, Russia, 443001, Samara, Molodogvardeyskaya Street 151; E-mail: ko@smr.ru; Phones: +7 (846) 332-56-22, Fax: +7 (846) 332-56-20