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Parameter optimization of a tribometric device for rapid assessment of substrate surface cleanliness

N.L. Kazanskiy1,2 V.A. Kolpakov1,2 A.I. Kolpakov1,2 S.V. Krichevsky1,2 N.A. Ivliev1,2
1Image Processing Systems Institute of RAS 

2Samara State Aerospace University named after academician S.P. Korolev 

 PDF, 118 kB

Pages: 76-79.

The authors optimize the parameters and operation modes of a device for rapid assessment of surface cleanliness, relying upon a tribometric interaction of two surfaces. As a result of the optimization, the device parameters and operation modes that ensure a precise measurement of substrate surface cleanliness are quantified. It is shown that in combination with the computer-aided analysis the rapid assessment device enables a multiple use of the indenter substrate when assessing the cleanliness of the entire substrate surface and the surfaces characterized by different contamination level.

tribometric device, surface cleanliness, computer-aided analysis, contamination level.

Kazanskiy NL, Kolpakov VA, Kolpakov AI, Krichevsky SV, Ivliev NA. Parameter optimization of a tribometric device for rapid assessment of substrate surface cleanliness. Computer Optics 2005; 28: 76-79.


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