Diffractive-refractive achromatic objectives for euv-range
G.I. Greysukh, E.G. Ezhov, I.A. Levin, S.A. Stepanov

Penza State University of Architecture and Construction

Full text of article: Russian language.

Abstract:
The dispersing model of the optical material allowing to use in EUV-range well-known optical design programs is presented. Diffractive-refractive photolithographic objectives achromatized by diffractive-refractive corrector including Fresnel lens are designed. It is shown, that such objectives in an EUV-range are capable  to compete with mirror objectives which were considered earlier as the uncontested.

Key words:
extreme ultraviolet, diffractive lens, refractive Fresnel lens, dispersion, achromatization, secondary spectrum, diffractive-refractive objective, confocal objective, telecentricity, nanolithography.

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